7514. Plasma-enhanced chemical vapour deposition in thin GeO2, SnOx, GeO2-SnOx, and In2O3 films: S Reich et al,Thin Solid Films, 189, 1990, 293–302

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 148 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91582-9