✦ LIBER ✦

Plasma enhanced chemical vapour deposition of tungsten and tungsten silicide thin films

✍ Scribed by S. McClatchie; H. Thomas; D.V. Morgan

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Preparation of low resistivity tungsten

✍ A. Belkacem; Y. Arnal; J. Pelletier; E. André; J.C. Oberlin 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 311 KB

Plasma-enhanced chemical vapor depositio

✍ M.A. Mahowald; N.J. Ianno 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 333 KB

ChemInform Abstract: Deposition of Elect

✍ W. B. HENLEY; G. J. SACKS 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 27 KB 👁 2 views

Resistivity and oxidation of tungsten si

✍ Robert J. Miller 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 385 KB

Plasma-enhanced chemical vapour depositi

✍ M. Vogt; E. Kändler; S. Martin; K. Drescher 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 400 KB

Plasma-assisted deposition of tungsten-c

✍ F. Fracassi; R. d'Agostino; F. Palumbo; F. Bellucci; T. Monetta 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 588 KB