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Plasma assisted ion plating deposition of optical thin films for coatings and integrated optical applications

✍ Scribed by M Varasi; C Misiano; C Mancini; P Sartori


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
455 KB
Volume
36
Category
Article
ISSN
0042-207X

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Formation of Optical Thin Films by Ion a
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An overview of ion and plasma assisted techniques for optical thin films is given. The individual deposition methods are described and their specific advantages and drawbacks with respect to optical thin film deposition presented. It is shown that ion and plasma assistance can have also unwelcome si