Plasma deposition of metal oxide films for integrated optics : A. H. Bailey, D. A. Darbyshire, A. P. Overbury, C. W. Pitt and J. Newton. Vacuum36(1–3), 139 (1986)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 129 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90283-6