Plasma-assisted chemical vapour deposition with titanium amides as precursors
β Scribed by H.-R. Stock; H. Berndt; P. Mayr
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 656 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0257-8972
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In this work the use of two metallo-organic compounds, titanium tetrakisdialkylamides, was investigated with a pulsed d.c. plasma-assisted chemical vapour deposition process to deposit layers on steel substrates and hard metals. The layers have been studied by scanning electron microscopy X-ray diff
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