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Plasma assisted chemical vapour deposition of Cr coatings using chromium (III) acetylacetonate vapour source

✍ Scribed by P. Antony Premkumar; P. Kuppusami; Arup Dasgupta; C. Mallika; K.S. Nagaraja; V.S. Raghunathan

Book ID: 113790006
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 271 KB
Volume: 61
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2006.04.003

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