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Planarization of Nonmagnetic Films on Bit Patterned Substrates by Gas Cluster Ion Beams

✍ Scribed by Nagato, K.; Hoshino, H.; Naito, H.; Hirota, T.; Tani, H.; Sakane, Y.; Toyoda, N.; Yamada, I.; Nakao, M.; Hamaguchi, T.

Book ID: 114654022
Publisher: IEEE
Year: 2010
Tongue: English
Weight: 427 KB
Volume: 46
Category: Article
ISSN: 0018-9464
DOI: 10.1109/tmag.2010.2044379

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