๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Modification and smoothing of patterned surface by gas cluster ion beam irradiation

โœ Scribed by T. Hirota; N. Toyoda; A. Yamamoto; I. Yamada

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
395 KB
Volume
256
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Smoothing of ZnO films by gas cluster io
Smoothing of ZnO films by gas cluster ion beam
โœ H. Chen; S.W. Liu; X.M. Wang; M.N. Iliev; C.L. Chen; X.K. Yu; J.R. Liu; K. Ma; W ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 291 KB
Low-damage surface smoothing of laser cr
Low-damage surface smoothing of laser crystallized polycrystalline silicon using gas cluster ion beam
โœ H. Tokioka; H. Yamarin; T. Fujino; M. Inoue; T. Seki; J. Matsuo ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 424 KB

Surface smoothing of laser crystallized polycrystalline silicon (poly-Si) films using gas cluster ion beam (GCIB) technology has been studied. It is found that both SF6-GCIB and O2-GCIB decrease the height of hillocks and reduce the surface roughness of the irradiated films. The mean surface roughne