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Morphological evolution of surfaces irradiated by gas cluster ion beams during thin film deposition

✍ Scribed by S. Inoue; N. Toyoda; H. Tsubakino; I. Yamada

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 337 KB
Volume: 237
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.05.022

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