Cluster size dependence of SiO2 thin film formation by O2 gas cluster ion beams
โ Scribed by T. Mashita; N. Toyoda; I. Yamada
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 353 KB
- Volume
- 256
- Category
- Article
- ISSN
- 0169-4332
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