Surface oxidation of Si assisted by irradiation with large gas cluster ion beam in an oxygen atmosphere

✍ Scribed by K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 245 KB
• Volume: 256
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.12.026