Smoothing of ZnO films by gas cluster ion beam
โ Scribed by H. Chen; S.W. Liu; X.M. Wang; M.N. Iliev; C.L. Chen; X.K. Yu; J.R. Liu; K. Ma; W.K. Chu
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 291 KB
- Volume
- 241
- Category
- Article
- ISSN
- 0168-583X
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Surface smoothing of laser crystallized polycrystalline silicon (poly-Si) films using gas cluster ion beam (GCIB) technology has been studied. It is found that both SF6-GCIB and O2-GCIB decrease the height of hillocks and reduce the surface roughness of the irradiated films. The mean surface roughne
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