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Low damage smoothing of magnetic material films using a gas cluster ion beam

โœ Scribed by S. Kakuta; S. Sasaki; T. Hirano; K. Ueda; T. Seki; S. Ninomiya; M. Hada; J. Matsuo

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
279 KB
Volume
257
Category
Article
ISSN
0168-583X

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