The fabrication of submicron gated wires on GaAs/AlGaAs heterostructures using low energy Ga ion beam damage

✍ Scribed by E.H. Linfield; D.A. Ritchie; G.A.C. Jones; J.E.F. Frost; D.C. Peacock; M. Pepper

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 336 KB
• Volume: 11
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(90)90064-z