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Planarization of amorphous carbon films on patterned substrates using gas cluster ion beams

✍ Scribed by Toyoda, Noriaki; Nagato, Keisuke; Tani, Hiroshi; Sakane, Yasuo; Nakao, Masayuki; Hamaguchi, Tetsuya; Yamada, Isao

No coin nor oath required. For personal study only.

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