Size effects of gas cluster ions on beam transport, amorphous layer formation and sputtering

✍ Scribed by Noriaki Toyoda; Isao Yamada

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 736 KB
• Volume: 267
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2009.01.055