✦ LIBER ✦

Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators

✍ Scribed by H.P Loebl; M Klee; C Metzmacher; W Brand; R Milsom; P Lok

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Shear mode coupling and properties dispe

✍ F. Martin; M.-E. Jan; B. Belgacem; M.-A. Dubois; P. Muralt 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 122 KB

High-Q AlN/SiO2 symmetric composite thin

✍ Artieda, A.; Muralt, P. 📂 Article 📅 2008 🏛 IEEE 🌐 English ⚖ 583 KB

Integrated approach to electrode and AlN

✍ R. Jakkaraju; G. Henn; C. Shearer; M. Harris; N. Rimmer; P. Rich 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 327 KB

Two-step sputtered ZnO piezoelectric fil

✍ Re-Ching Lin; Ying-Chung Chen; Kuo-Sheng Kao 📂 Article 📅 2007 🏛 Springer 🌐 English ⚖ 439 KB

Preparation of AlN thin films for film b

✍ Kan Li; Hao Jin; De-miao Wang; Yi-fei Tang 📂 Article 📅 2009 🏛 SP Zhejiang University Press 🌐 English ⚖ 341 KB

AlN thin film as waveguide for shear aco

✍ Martin, F.; Muralt, P. 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 311 KB