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Two-step sputtered ZnO piezoelectric films for film bulk acoustic resonators

✍ Scribed by Re-Ching Lin; Ying-Chung Chen; Kuo-Sheng Kao

Book ID: 106020701
Publisher: Springer
Year: 2007
Tongue: English
Weight: 439 KB
Volume: 89
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-007-4157-8

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