Integrated approach to electrode and AlN depositions for bulk acoustic wave (BAW) devices

✍ Scribed by R. Jakkaraju; G. Henn; C. Shearer; M. Harris; N. Rimmer; P. Rich

• Book ID: 108411328
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 327 KB
• Volume: 70
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(03)00386-1