✦ LIBER ✦
Sputtering and chemical vapour deposition of piezoelectric ZnO, AlN and K3Li2Nb5O15 films for optical waveguides and surface acoustic wave devices
✍ Scribed by Tadashi Shiosaki; Masatoshi Adachi; Akira Kawabata
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 967 KB
- Volume
- 96
- Category
- Article
- ISSN
- 0040-6090
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