✦ LIBER ✦
Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonator
✍ Scribed by F. Martin; M.-E. Jan; B. Belgacem; M.-A. Dubois; P. Muralt
- Book ID
- 108289366
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 122 KB
- Volume
- 514
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.