✦ LIBER ✦

High-Q AlN/SiO2 symmetric composite thin film bulk acoustic wave resonators

✍ Scribed by Artieda, A.; Muralt, P.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Piezoelectric thin AlN films for bulk ac

✍ H.P Loebl; M Klee; C Metzmacher; W Brand; R Milsom; P Lok 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 94 KB

GHz High- Lateral Overmoded Bulk Acousti

✍ Songbin Gong; Nai-Kuei Kuo; Piazza, G. 📂 Article 📅 2012 🏛 IEEE 🌐 English ⚖ 295 KB

High-frequency sensor technologies for i

✍ Humberto Campanella; José Antonio Plaza; Josep Montserrat; Arantxa Uranga; Jaume 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 643 KB

Shear mode coupling and properties dispe

✍ F. Martin; M.-E. Jan; B. Belgacem; M.-A. Dubois; P. Muralt 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 122 KB

Tunable bulk acoustic wave resonators ba

✍ Berge, J.; Gevorgian, S. 📂 Article 📅 2011 🏛 IEEE 🌐 English ⚖ 428 KB

[IEEE 2007 IEEE Ultrasonics Symposium -

✍ Hara, M.; Yokoyama, T.; Ueda, M.; Satoh, Y. 📂 Article 📅 2007 🏛 IEEE ⚖ 401 KB