✦ LIBER ✦
High-frequency sensor technologies for inertial force detection based on thin-film bulk acoustic wave resonators (FBAR)
✍ Scribed by Humberto Campanella; José Antonio Plaza; Josep Montserrat; Arantxa Uranga; Jaume Esteve
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 643 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
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