Physical and electrical properties of Ge-implanted SiO[sub 2] films

✍ Scribed by Fukuda, H.; Sakuma, S.; Yamada, T.; Nomura, S.; Nishino, M.; Higuchi, T.; Ohshima, S.

• Book ID: 121500855
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 281 KB
• Volume: 90
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1399024