SHI induced re-crystallization of Ge implanted SiO2 films

✍ Scribed by N. Srinivasa Rao; A.P. Pathak; N. Sathish; G. Devaraju; S.A. Khan; K. Saravanan; B.K. Panigrahi; K.G.M. Nair; D.K. Avasthi

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 362 KB
• Volume: 268
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2010.02.013