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Phase formation after nitrogen implantation into molybdenum

✍ Scribed by D. Manova; Y. Bohne; J.W. Gerlach; S. Mändl; H. Neumann; B. Rauschenbach


Book ID
104068534
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
255 KB
Volume
240
Category
Article
ISSN
0168-583X

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Phase formation in Ti after high fluence
✍ D. Manova; J.W. Gerlach; H. Neumann; W. Assmann; S. Mändl 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 377 KB

Nitrogen ion implantation in titanium using plasma immersion ion implantation (PIII) is investigated at a pulse voltage of 15 keV and elevated temperatures between 300 and 750 °C. Starting the implantation at room temperature leads to the parallel formation of TiN and Ti 2 N, as observed by X-ray di