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Formation of Si3N4 by nitrogen implantation into SiC

✍ Scribed by S. Miyagawa; K. Baba; M. Ikeyama; K. Saitoh; S. Nakao; Y. Miyagawa

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 572 KB
Volume: 83
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)02832-3

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