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Effects of ion-implanted nitrogen impurities on molybdenum silicide formation

✍ Scribed by K.T. Ho; M.-A. Nicolet; D.M. Scott

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 507 KB
Volume: 127
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(85)90222-6

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