✦ LIBER ✦
Effects of ion-implantation-induced damages and impurity on platinum silicide formation: Y Mashiko et al, J Appl. Phys, 53 (9), 1982, 6144–6147
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 150 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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