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Performance and reliability of advanced High-K/Metal gate stacks (Invited Paper)

✍ Scribed by X. Garros; M. Casse; G. Reimbold; M. Rafik; F. Martin; F. Andrieu; V. Cosnier; F. Boulanger

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 932 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.03.100

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