Application of combinatorial methodologies for work function engineering of metal gate/high-κ advanced gate stacks

✍ Scribed by M.L. Green; K.-S. Chang; S. DeGendt; T. Schram; J. Hattrick-Simpers

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 814 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.04.128