Recent advances and current challenges in the search for high mobility band-edge high-k/metal gate stacks

✍ Scribed by V. Narayanan; V.K. Paruchuri; E. Cartier; B.P. Linder; N. Bojarczuk; S. Guha; S.L. Brown; Y. Wang; M. Copel; T.C. Chen

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 501 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.04.079