✦ LIBER ✦

PC system for improving the control of reactive gas dosage in sputtering processes for film deposition

✍ Scribed by G.N. Pedersen; H. Jensen; G. S∅rensen

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion bombardment of AlN films deposited i

✍ K. Alkjærsig; H.B. Christensen; B.K. Gupta; H. Jensen; U.M. Jensen; G.N. Pederse 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 881 KB

A single quality factor for the depositi

✍ G. Messina; S. Santangelo; A. Tagliaferro; A. Tucciarone 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 151 KB

Hysteresis effect in reactive R.F. sputt

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Improvement of the crystalline quality o

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✍ Ko, J.-S.; Park, J.-K.; Lee, W.-S.; Huh, J.-Y.; Baik, Y.-J. 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 446 KB

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✍ Jianqiao Huang; Gerassimos Orkoulas; Panagiotis D. Christofides 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 968 KB