✦ LIBER ✦
Improvement of the crystalline quality of an yttria-stabilized zirconia film on silicon by a new deposition process in reactive sputtering
✍ Scribed by Susumu Horita; Toshiyuki Tajima; Masakazu Murakawa; Takaharu Fujiyama; Tomonobu Hata
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 933 KB
- Volume
- 229
- Category
- Article
- ISSN
- 0040-6090
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