Insertion of nanocrystalline diamond film and the addition of hydrogen gas during deposition for adhesion improvement of cubic boron nitride thin film deposited by unbalanced magnetron sputtering method

✍ Scribed by Ko, J.-S.; Park, J.-K.; Lee, W.-S.; Huh, J.-Y.; Baik, Y.-J.

• Book ID: 121935501
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 446 KB
• Volume: 534
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.02.058