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Effect of deposition temperature on cubic boron nitride thin film deposited by unbalanced magnetron sputtering method with a nanocrystalline diamond buffer layer

✍ Scribed by Eun-Sook Lee,Jong-Keuk Park,Wook-Seong Lee…


Book ID
126367526
Publisher
TechnoPress
Year
2013
Tongue
English
Weight
610 KB
Volume
19
Category
Article
ISSN
1598-9623

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