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Effect of radio-frequency electric power applied to a boron nitride unbalanced magnetron sputter target on the deposition of cubic boron nitride thin film

✍ Scribed by Ji-Sun Ko,Jong-Keuk Park,Wook-Seong Lee…


Book ID
126367525
Publisher
TechnoPress
Year
2013
Tongue
English
Weight
507 KB
Volume
19
Category
Article
ISSN
1598-9623

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