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Pattern replication accuracy in 1 : 1 SR lithography

✍ Scribed by T. Tanaka; M. Futagami; M. Morigami; K. Okada; S. Fujiwara; Y. Yamaoka; M. Harada; K. Kaneda; J. Nishino; S. Suzuki

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 396 KB
Volume: 21
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90029-5

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