✦ LIBER ✦
Patterning characteristics under small vibrations of the mask and wafer in SR lithography
✍ Scribed by M. Fukuda; N. Koyama; H. Tsuyuzaki; M. Suzuki; S. Ishihara
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 487 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0167-9317
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