Thorough investigations on the resolution of replicated resist patterns in conventional x-ray lithography

✍ Scribed by Koichi Okada; Junji Matsui

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 989 KB
• Volume: 3
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(85)90074-7