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Oxygen sensitivity of SrTiO3 thin film prepared using atomic layer deposition

✍ Scribed by Toru Hara; Takashi Ishiguro

Book ID: 108265086
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 897 KB
Volume: 136
Category: Article
ISSN: 0925-4005
DOI: 10.1016/j.snb.2008.12.026

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