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Oxygen precipitation at the oxidation-induced defects in silicon

✍ Scribed by Sato, N. ;Kajiwara, K. ;Shibata, A.

Publisher: John Wiley and Sons
Year: 1973
Tongue: English
Weight: 120 KB
Volume: 16
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210160153

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