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Oxygen induced broadening effects studied by RBS and SIMS

✍ Scribed by W. Vandervorst; F.R. Shepherd; M.L. Swanson; H.H. Plattner; O.M. Westcott; I.V. Mitchell


Book ID
113277685
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
471 KB
Volume
15
Category
Article
ISSN
0168-583X

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A 200 nm Ti Ðlm was deposited on a polished AlN ceramic substrate at 200 Γ„C by electron beam evaporation and then annealed under high vacuum conditions. The MCs'-SIMS technique (detecting MCs' secondary ions under Cs' primary ion bombardment, where M is the element to be analysed), RBS and x-ray di