✦ LIBER ✦
An investigation of the Cs bombardment induced altered layer in Si by MEIS, RBS, SIMS and IMPETUS simulation
✍ Scribed by R. Valizadeh; J.A. van den Berg; R. Badheka; A. Al Bayati; D.G. Armour; D. Sykes
- Book ID
- 113283003
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 513 KB
- Volume
- 64
- Category
- Article
- ISSN
- 0168-583X
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