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Ion bombardment induced segregation effects in VDx studied by SIMS and SNMS

✍ Scribed by J Scholz; H Züchner; H Paulus; K.-H Müller


Book ID
117623689
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
342 KB
Volume
253-254
Category
Article
ISSN
0925-8388

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