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Oxygen impurities in Ga0.51In0.49P grown by solid-source molecular beam epitaxy

โœ Scribed by N. Xiang; A. Tukiainen; M. Pessa; J. Dekker; J. Likonen


Book ID
110390149
Publisher
Springer US
Year
2002
Tongue
English
Weight
328 KB
Volume
13
Category
Article
ISSN
0957-4522

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In 0.48 Ga 0.52 P/In 0.20 Ga 0.80 As/GaAs pseudomorphic high electron mobility transistor (p-HEMT) structures were grown by solid-source molecular beam epitaxy (SSMBE) using a valved phosphorus cracker cell. The electron mobility and sheet carrier density at room temperature were 1700 cm 2 /Vs and 3