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Oxygen accumulation effect for depth profiling of thin-multilayered sample using low-energy oxygen ion beam

โœ Scribed by Suguru Nishinomiya; Naoyoshi Kubota; Shun-ichi Hayashi; Hisataka Takenaka


Book ID
112206924
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
245 KB
Volume
45
Category
Article
ISSN
0142-2421

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