✦ LIBER ✦
Artifacts in low-energy depth profiling using oxygen primary ion beams: Dependence on impact angle and oxygen flooding conditions
✍ Scribed by Wittmaack, K.
- Book ID
- 121704070
- Publisher
- AVS (American Vacuum Society)
- Year
- 1998
- Tongue
- English
- Weight
- 377 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0734-211X
- DOI
- 10.1116/1.590271
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