✦ LIBER ✦
The optimization of incident angles of low-energy oxygen ion beams for increasing sputtering rate on silicon samples
✍ Scribed by T. Sasaki; N. Yoshida; M. Takahashi; M. Tomita
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 458 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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