✦ LIBER ✦
Ion mass interferences and matrix effects on SIMS depth profiling of thin Ti/Si multilayer films induced by hydrogen, carbon and oxygen contaminations
✍ Scribed by M. Cwil; P. Konarski; J. Ciosek
- Book ID
- 118453673
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 575 KB
- Volume
- 263
- Category
- Article
- ISSN
- 1387-3806
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